JPH0462759U - - Google Patents
Info
- Publication number
- JPH0462759U JPH0462759U JP10395090U JP10395090U JPH0462759U JP H0462759 U JPH0462759 U JP H0462759U JP 10395090 U JP10395090 U JP 10395090U JP 10395090 U JP10395090 U JP 10395090U JP H0462759 U JPH0462759 U JP H0462759U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- substage
- vertical displacement
- displacement mechanism
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 4
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10395090U JPH0462759U (en]) | 1990-10-01 | 1990-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10395090U JPH0462759U (en]) | 1990-10-01 | 1990-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0462759U true JPH0462759U (en]) | 1992-05-28 |
Family
ID=31849029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10395090U Pending JPH0462759U (en]) | 1990-10-01 | 1990-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0462759U (en]) |
-
1990
- 1990-10-01 JP JP10395090U patent/JPH0462759U/ja active Pending
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